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Lecture Notes on Principles of Plasma Processing 2003 edition
Francis F. Chen
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Lecture Notes on Principles of Plasma Processing 2003 edition
Francis F. Chen
Plasma processing of semiconductors is an interdisciplinary field requiring knowledge of both plasma physics and chemical engineering. This title introduces basic plasma concepts to those who have studied undergraduate electromagnetics but have had no previous exposure to plasmas.
219 pages, 177 black & white illustrations, biography
| Medie | Bøger Bog |
| Udgivet | 31. januar 2003 |
| ISBN13 | 9780306474972 |
| Forlag | Springer Science+Business Media |
| Antal sider | 219 |
| Mål | 213 × 278 × 12 mm · 517 g |
| Sprog | Engelsk |
![Cover for Francis F. Chen · Introduction to Plasma Physics (Paperback Bog) [Softcover reprint of the original 1st ed. 1974 edition] (2012)](https://imusic.b-cdn.net/images/item/original/617/9781475704617.jpg?francis-f-chen-2012-introduction-to-plasma-physics-paperback-bog&class=scaled&v=1532785039)
![Cover for Francis F. Chen · Introduction to Plasma Physics and Controlled Fusion: Volume 1: Plasma Physics (Paperback Bog) [Softcover reprint of hardcover 2nd ed. 1984 edition] (2010)](https://imusic.b-cdn.net/images/item/original/013/9781441932013.jpg?francis-f-chen-2010-introduction-to-plasma-physics-and-controlled-fusion-volume-1-plasma-physics-paperback-bog&class=scaled&v=1532785039)