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Fundamental Principles of Optical Lithography: The Science of Microfabrication
Mack, Chris (Lithoguru.com)
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Fundamental Principles of Optical Lithography: The Science of Microfabrication
Mack, Chris (Lithoguru.com)
Fundamental Principles of Optical Lithography: The Science of Microfabrication presents a complete theoretical and practical treatment of the topic of lithography for both students and researchers. This sole-authored text includes optional computer simulation exercises as well as problems at the end of each chapter.
534 pages, Illustrations
| Medie | Bøger Paperback Bog (Bog med blødt omslag og limet ryg) |
| Udgivet | 16. november 2007 |
| ISBN13 | 9780470727300 |
| Forlag | John Wiley & Sons Inc |
| Antal sider | 544 |
| Mål | 247 × 174 × 29 mm · 916 g |
| Sprog | Engelsk |
Se alt med Mack, Chris (Lithoguru.com) ( f.eks. Paperback Bog og Hardcover bog )