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Modelling of Microfabrication Systems - Microtechnology and MEMS Softcover reprint of hardcover 1st ed. 2003 edition
Raja Nassar
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Modelling of Microfabrication Systems - Microtechnology and MEMS Softcover reprint of hardcover 1st ed. 2003 edition
Raja Nassar
This is the first book to address modelling of systems that are important to the fabrication of three-dimensional microstructures. It is unique in that it focuses on high aspect ratio microtechnology, ranging from ion beam micromachining to x-ray lithography.
279 pages, 4 black & white illustrations, biography
Medie | Bøger Paperback Bog (Bog med blødt omslag og limet ryg) |
Udgivet | 8. december 2010 |
ISBN13 | 9783642055362 |
Forlag | Springer-Verlag Berlin and Heidelberg Gm |
Antal sider | 270 |
Mål | 155 × 235 × 14 mm · 394 g |
Sprog | Tysk |
Se alt med Raja Nassar ( f.eks. Hardcover bog og Paperback Bog )