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Planar Processing Primer G. Anner Softcover reprint of the original 1st ed. 1990 edition
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Planar Processing Primer
G. Anner
Planar Processing Primer is based on lecture notes for a silicon planar process ing lecture/lab course offered at the University of Illinois-UC for over fifteen years. The text describes and explains, at an introductory level, the principal processing steps used to convert raw silicon into a semiconductor device or integrated circuit.
647 pages, biography
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