Nano- and Micro-Electromechanical Systems: Fundamentals of Nano- and Microengineering, Second Edition 2. udgave

Introduces concepts, methods, techniques, and technologies that are needed to solve a wide variety of problems related to high-performance nano- and micro systems. This book builds the theoretical foundation for understanding, modeling, controlling, simulating, designing, and deploying nano- and microelectromechanical devices.