Physical Design and Mask Synthesis for Directed Self-Assembly Lithography - NanoScience and Technology - Seongbo Shim - Bøger - Springer International Publishing AG - 9783319762937 - 3. april 2018
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Physical Design and Mask Synthesis for Directed Self-Assembly Lithography - NanoScience and Technology 2018 edition

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This book discusses physical design and mask synthesis of directed self-assembly lithography (DSAL). It covers the basic background of DSAL technology, physical design optimizations such as placement and redundant via insertion, and DSAL mask synthesis as well as its verification.


138 pages, 40 Tables, color; 54 Illustrations, color; 38 Illustrations, black and white; XIV, 138 p.

Medie Bøger     Hardcover bog   (Bog med hård ryg og stift omslag)
Udgivet 3. april 2018
ISBN13 9783319762937
Forlag Springer International Publishing AG
Antal sider 138
Mål 150 × 220 × 20 mm   ·   394 g
Sprog Tysk