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Laser Heat-Mode Lithography: Principle and Methods - Springer Series in Materials Science 2019 edition
Jingsong Wei
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Laser Heat-Mode Lithography: Principle and Methods - Springer Series in Materials Science 2019 edition
Jingsong Wei
This book provides a systematic description and analysis of laser heat-mode lithography, addressing the basic principles, lithography system, manipulation of feature size, grayscale lithography, resist thin films, and pattern transfer, while also presenting typical experimental results and applications.
208 pages, 160 Illustrations, color; 22 Illustrations, black and white; XIII, 208 p. 182 illus., 160
| Medie | Bøger Hardcover bog (Bog med hård ryg og stift omslag) |
| Udgivet | 29. november 2019 |
| ISBN13 | 9789811509421 |
| Forlag | Springer Verlag, Singapore |
| Antal sider | 208 |
| Mål | 506 g |
![Cover for Jingsong Wei · Nonlinear Super-Resolution Nano-Optics and Applications - Springer Series in Optical Sciences (Paperback Bog) [Softcover reprint of the original 1st ed. 2015 edition] (2016)](https://imusic.b-cdn.net/images/item/original/739/9783662525739.jpg?jingsong-wei-2016-nonlinear-super-resolution-nano-optics-and-applications-springer-series-in-optical-sciences-paperback-bog&class=scaled&v=1610400693)
![Cover for Jingsong Wei · Nonlinear Super-Resolution Nano-Optics and Applications - Springer Series in Optical Sciences (Hardcover bog) [2015 edition] (2014)](https://imusic.b-cdn.net/images/item/original/870/9783662444870.jpg?jingsong-wei-2014-nonlinear-super-resolution-nano-optics-and-applications-springer-series-in-optical-sciences-hardcover-bog&class=scaled&v=1414388236)